Harland G. Tompkins

A User's Guide to Ellipsometry (eBook, ePUB)

• Format: ePub

Produktbeschreibung

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.
A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.

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Produktdetails

• Verlag: Guilford Publications
• Seitenzahl: 272
• Erscheinungstermin: 21. März 2013
• Englisch
• ISBN-13: 9780486151922
• Artikelnr.: 39072957

Autorenporträt

Author Harland G. Tompkins is a Mesa, Arizona-based scientist associated with Motorola, Inc.

Inhaltsangabe

1. Theoretical Aspects 2. Instrumentation 3. Using Optical Parameters to
Determine Material Properties 4. Determining Optical Parameters for
Inaccessible Substrates and Unknown Films 5. Extremely Thin Films 6. The
Special Case of Polysilicon 7. The Effect of Roughness Case Studies Case 1.
Dissolution and Swelling of Thin Polymer Films Case 2. Ion Beam Interaction
with Silicon Case 3. Dry Oxidation of Metals Case 4. Optical Properties of
Sputtered Chromium Suboxide Thin Films Case 5. Ion-assisted Film Growth of
Zirconium Dioxide Case 6. Electrochemical/Ellipsometric Studies of Oxides
on Metals Case 7. Amorphous Hydrogenated Carbon Films Case 8. Fluoropolymer
Films on Silicon from Reactive Ion Etching Case 9. Various Films on InP
Case 10. Benzotriazole and Benzimidazole on Copper Case 11. Gas Adsorption
on Metal Surfaces Case 12. Silicon-Germanium Thin Films Case 13. Profiling
of HgCdTe Case 14. Oxides and Nitrides of Silicon Appendices

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