- understanding the causes of variability;
- design of test structures for variability characterization;
- statistically rigorous data analysis;
- techniques of design for manufacturability in lithography and in chemical mechanical polishing;
- statistical simulation, analysis, and optimization techniques for improving parametric yield.
Design for Manufacturability and Statistical Design: A Constructive Approach presents an overview of the methods that need to be mastered for state-of-the-art design for manufacturability and statistical design methodologies. It is an important reference for practitioners and students in the field of computer-aided design of integrated circuits.
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