- Shows how the utilization of feedback control in nanotechnology instrumentation can yield results far better than passive systems can
- Discusses the application of control systems to problems in microelectromechanical systems, microfluidics, optical trapping, nanofabrication, and quantum dynamics, among others
- Covers specific applications and the importance of controls in the use of MEMSActuators, Nanomanipulation, Micro Flow Control, and Micro-Scale Inertial Sensors
Feedback Control of MEMS to Atoms is an ideal book for control systems researchers interested in pursuing new application in the micro- and nanoscale domains, and researchers developing micro- and nanosystems that are interested in learning how control systems can benefit their work.
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