Additional chapters consider the modeling of ferroelectric phase transformation, structural characterization, and the differences and similarities between HFO2 and standard ferroelectric materials. Finally, HfO2 based devices are summarized.
- Explores all aspects of the structural and electrical properties of HfO2, including processes, modelling and implementation into semiconductor devices
- Considers potential applications including FeCaps, FeFETs, NCFETs, FTJs and more
- Provides comparison of an emerging ferroelectric material to conventional ferroelectric materials with insights to the problems of downscaling that conventional ferroelectrics face
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