Focused Ion Beam Systems (eBook, ePUB)

Basics and Applications
Redaktion: Yao, Nan

• Format: ePub

Produktbeschreibung

The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.

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Produktdetails

• Verlag: Cambridge University Press
• Erscheinungstermin: 13. September 2007
• Englisch
• ISBN-13: 9781139810104
• Artikelnr.: 37854373

Autorenporträt

NAN YAO holds several positions at Princeton University, New Jersey. He is director of the Imaging and Analysis Center; Senior Research Scholar at the Institute for the Science and Technology of Materials; and a lecturer in Mechanical and Aerospace Engineering.

Inhaltsangabe

List of contributors; Preface; 1. Introduction to the focused ion beam
system Nan Yao; 2. Interaction of ions with matter Nobutsugu Imanishi; 3.
Gas assisted ion beam etching and deposition Hyoung Ho (Chris) Kang, Clive
Chandler and Matthew Weschler; 4. Imagining using electrons and ion beams
Kaoru Ohya and Tohru Ishitani; 5. Characterization methods using FIB/SEM
DualBeam instrumentation Steve Rentjens and Lucille A. Giannuzzi; 6.
High-density FIB-SEM 3D nanotomography: with applications of real-time
imaging during FIB milling E. L. Principe; 7. Fabrication of nanoscale
structures using ion beams Ampere A. Tseng; 8. Preparation for
physico-chemical analysis Richard Langford; 9. In-situ sample manipulation
and imaging T. Kamino, T. Yaguchi, T. Ohnishi and T. Ishitani; 10.
Micro-machining and mask repair Mark Utlaut; 11. Three-dimensional
visualization of nanostructured materials using focused ion beam tomography
Derren Dunn, Alan J. Kubis and Robert Hull; 12. Ion beam implantation of
surface layers Daniel Recht and Nan Yao; 13. Applications for biological
materials Kirk Hou and Nan Yao; 14. Focused ion beam systems as a
multifunctional tool for nanotechnology Toshiaki Fujii, Tatsuya Asahata and
Takashi Kaito; Index.