Richard Leach

Fundamental Principles of Engineering Nanometrology (eBook, ePUB)

• Format: ePub

Produktbeschreibung

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

• Provides a basic introduction to measurement and instruments
• Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
• Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments)
• Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
• Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

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Produktdetails

• Verlag: Elsevier Science & Techn.
• Seitenzahl: 352
• Erscheinungstermin: 3. September 2009
• Englisch
• ISBN-13: 9781437778328
• Artikelnr.: 47308564

Autorenporträt

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati