Geraldine Cogin Shwartz

Handbook of Semiconductor Interconnection Technology (eBook, PDF)

Redaktion: Schwartz, Geraldine C.; Srikrishnan, Kris V.

• Format: PDF

Produktbeschreibung

This book describes the equipment used in manufacturing for deposition and etching, such as electrochemical deposition equipment used for plating copper. It emphasizes the measurement of mechanical and thermal properties as well as the use of EELS, energy filtering TEM, and atomic force microscopy. Expert contributors explore recently reported developments in thin film liners and barriers, choices for low-dielectric insulators, major issues in processing, and deposition and etching of metallic films. The book also examines the reliability of thin metallic and insulating films and features expanded discussions on copper reliability. Publications and patents are extensively cited throughout the book.

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Produktdetails

• Verlag: Taylor & Francis
• Seitenzahl: 536
• Erscheinungstermin: 22. Februar 2006
• Englisch
• ISBN-13: 9781420017656
• Artikelnr.: 53333603

Autorenporträt

Geraldine C. Schwartz, Geraldine Cogin Shwartz, Kris V. Srikrishnan