James D. Plummer, Peter B. Griffin

Integrated Circuit Fabrication (eBook, PDF)

Science and Technology

• Format: PDF

Produktdetails

• Verlag: Cambridge University Press
• Erscheinungstermin: 16. November 2023
• Englisch
• ISBN-13: 9781009303576
• Artikelnr.: 70913319

Autorenporträt

James D. Plummer is a Professor of Electrical Engineering at Stanford University. He has over thirty years of experience in teaching semiconductor fabrication and device physics, and has served on the Board of Directors of companies including Intel and Cadence. He is a Member of the National Academy of Engineering and the American Academy of Arts and Sciences, a Fellow of the Institute of Electrical and Electronics Engineers, and a co-author of Silicon VLSI Technology (2000).

Inhaltsangabe

1. Historical Perspective, Moore's Law and Future Technology Prospects
2. Modern CMOS Technology
3. Semiconductor Materials = Crystal Growth, Wafer Preparation and Material Properties
4. Semiconductor Manufacturing - Clean Rooms, Wafer Cleaning, Gettering and Chip Yield
5. Lithography
6. Semiconductor/Insulator Interfaces
7. Doping in Semiconductors
8. Ion Implantation
9. Etching Technologies and Chemical-Mechanical Polishing
10. Deposition Technologies
11. Backend (Interconnect) Processing Technologies.