Nadim Maluf

Introduction to Microelectromechanical Systems Engineering, Second Edition (eBook, PDF)

• Format: PDF

Produktbeschreibung

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list.

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Produktdetails

• Verlag: Artech House
• Seitenzahl: 304
• Erscheinungstermin: 1. Januar 2003
• Englisch
• ISBN-13: 9781580535915
• Artikelnr.: 43406006

Autorenporträt

Nadim Maluf is vice president of New Focus, Inc. and a consulting professor of electrical engineering at Stanford University. Prior to joining New Focus, he was head of research and development at NovaSenor. A best-selling author in the area of MEMS technology, Dr. Maluf earned his Ph.D. in electrical engineering at Stanford University and his M.S. in electrical engineering at the California Institute of Technology. Kirt Williams is a MEMS consultant based in California’s Silicon Valley. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley. He is the author of numerous papers on MEM devices and fabrication processes.