Marc J. Madou

Manufacturing Techniques for Microfabrication and Nanotechnology (eBook, PDF)

• Format: PDF

Produktbeschreibung

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

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Produktdetails

• Verlag: Taylor & Francis
• Seitenzahl: 670
• Erscheinungstermin: 13. Juni 2011
• Englisch
• ISBN-13: 9781439895306
• Artikelnr.: 58255685

Autorenporträt

Marc J. Madou

Inhaltsangabe

Lithography: Photolithography. Next
Generation Lithographies and Lithography Research. Pattern Transfer With Subtractive Techniques: Dry Etching. Wet Chemical Etching and Wet Bulk Micromachining
Pools as Tools. Thermal Energy
Based Removing. Mechanical Energy
Based Removing. Pattern Transfer With Additive Techniques: Physical and Chemical Vapor Deposition
Thin Film Properties and Surface Micromachining. Chemical, Photochemical and Electrochemical Forming Techniques. Thermal Energy
Based Forming Techniques
Thermoforming. Micro
Molding Techniques
LIGA.