With an emphasis on practical applications and real-world case studies, this volume presents the principles of widely used advanced surface and structural characterization techniques for quality assurance, contamination control, and process improvement. The book reviews the most popular and powerful analysis and quality control tools, explaining the appropriate uses and related technical requirements. The text features coverage of a wide range of topics, including Auger electron spectroscopy, atomic force microscopy, transmission electron microscopy, gel electrophoresis chromatography, laser confocal scanning florescent microscopy, and UV spectroscopy. It presents the fundamentals of vacuum as well as X-ray diffraction principles.
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