Eugene Machlin

Materials Science in Microelectronics I (eBook, PDF)

The Relationships Between Thin Film Processing and Structure

• Format: PDF

Produktbeschreibung

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.

The first volume of Materials Science in Microelectronics focuses on the first relationship - that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer - determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.

An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.

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Produktdetails

• Verlag: Elsevier Science & Techn.
• Seitenzahl: 270
• Erscheinungstermin: 7. Juli 2010
• Englisch
• ISBN-13: 9780080459608
• Artikelnr.: 38117728