Sunipa Roy, Chandan Kumar Sarkar

MEMS and Nanotechnology for Gas Sensors (eBook, ePUB)

• Format: ePub

Produktbeschreibung

Solid-state gas sensors based on semiconducting sensing materials represent a viable solution for an increasing number of applications, ranging from health care and safety to quality control in industrial processes. Enhancing the sensitivity of the sensor requires an elevated temperature with uniform temperature distribution throughout the sensing layer, which can be accomplished through the use of the MEMS micro-heater. This book covers the different fabrication procedures and sensor applications pertaining to gas sensors with respect to MEMS and nanotechnology.

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Produktdetails

• Verlag: Taylor & Francis
• Seitenzahl: 242
• Erscheinungstermin: 19. Dezember 2017
• Englisch
• ISBN-13: 9781351830249
• Artikelnr.: 50533436

Autorenporträt

Sunipa Roy is assistant professor of electronics and telecommunications engineering at Guru Nanak Institute of Technology, Calcutta, India. She received her M.Tech in VLSI and microelectronics from West Bengal University of Technology in 2009, and her Ph.D in engineering from Jadavpur University in 2014. She has served as a fellow of the Council of Scientific and Industrial Research (India), is a member of the Institution of Engineers (India), and a member of the IEEE. She has also presented numerous papers in journals and conferences. Her research interests include MEMS, nanotechnology, and graphene and its application as a gas sensor.



Chandan Kumar Sarkar is professor of electronics and telecommunications engineering at Jadavpur University, Calcutta, India. He received his B.Sc (Hons) and M.Sc in physics from Aligarh Muslim University, India in 1975, earned his Ph.D from Calcutta University in 1979, and his D.Phil from the University of Oxford, UK in 1984. In 1980, Dr. Sarkar received the British Royal Commission Fellowship to work at the University of Oxford. He worked as a visiting scientist at the Max Planck Laboratory in Stuttgart, Germany, and at Linkoping University in Sweden. He also taught in the Department of Physics at the University of Oxford.

Inhaltsangabe

Section I: Fabrication Procedure. Introduction. Substrate for MEMS.
Deposition. Photolithography: Pattern Transfer. Structuring MEMS:
Micromachining. Microheaters for Gas Sensor. Section II: Sensor
Applications. Sensing with Graphene. Nanocrystalline ZnO-Based
Microfabricated Chemical Sensor. Nanostructures for Volatile Organic
Compound Detection. Sensor Interfaces. MEMS- and Nanotechnology-Enabled
Sensor Applications.