Simon S. Cohen, Gennady Sh. Gildenblat

Metal - Semiconductor Contacts and Devices (eBook, PDF)

Redaktion: Einspruch, Norman G.

• Format: PDF

Produktbeschreibung

VLSI Electronics Microstructure Science, Volume 13: Metal-Semiconductor Contacts and Devices presents the physics, technology, and applications of metal-semiconductor barriers in digital integrated circuits. The emphasis is placed on the interplay among the theory, processing, and characterization techniques in the development of practical metal-semiconductor contacts and devices.

This volume contains chapters that are devoted to the discussion of the physics of metal-semiconductor interfaces and its basic phenomena; fabrication procedures; and interface characterization techniques, particularly, ohmic contacts. Contacts that involve polycrystalline silicon; applications of the metal-semiconductor barriers in MOS, bipolar, and MESFET digital integrated circuits; and methods for measuring the barrier height are covered as well.

Process engineers, device physicists, circuit designers, and students of this discipline will find the book very useful.

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Produktdetails

• Verlag: Elsevier Science & Techn.
• Seitenzahl: 434
• Erscheinungstermin: 1. Dezember 2014
• Englisch
• ISBN-13: 9781483217796
• Artikelnr.: 42015022