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Metalorganic Vapor Phase Epitaxy (MOVPE) (eBook, PDF)

Growth, Materials Properties, and Applications

Redaktion: Irvine, Stuart; Capper, Peter
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Systematically discusses the growth method, material properties, and applications for key semiconductor materials MOVPE is a chemical vapor deposition technique that produces single or polycrystalline thin films. As one of the key epitaxial growth technologies, it produces layers that form the basis of many optoelectronic components including mobile phone components (GaAs), semiconductor lasers and LEDs (III-Vs, nitrides), optical communications (oxides), infrared detectors, photovoltaics (II-IV materials), etc. Featuring contributions by an international group of academics and industrialists,...

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