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Presenting a comprehensive overview of the state of the art of micro- and nanoelectronics, this book covers the field from fundamental science and material properties to novel ways of making nanodevices. It explores silicon compounds and processes; discusses FD SOI devices and candidates for post-CMOS nanoelectronics; and describes the latest developments in carbon nanotubes, graphene, and iii-v device structures. Containing contributions from experts in industry and academia, the text examines emerging materials and device architecture alternatives with the potential to shape the future of nanotechnology.
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