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This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

Produktbeschreibung
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

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Autorenporträt
Wolfgang Menz is the author of Microsystem Technology, published by Wiley.

Jürgen Mohr is the author of Microsystem Technology, published by Wiley.

Oliver Paul is the author of Microsystem Technology, published by Wiley.