Microsystems Mechanical Design (eBook, PDF)

Redaktion: De Bona, Francesco; Enikov, Eniko T.

• Format: PDF

Produktbeschreibung

This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.

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Produktdetails

• Verlag: Springer Vienna
• Seitenzahl: 211
• Erscheinungstermin: 23. März 2007
• Englisch
• ISBN-13: 9783211485491
• Artikelnr.: 44228158

Autorenporträt

Francesco De Bona, University of Udine, Italy. Eniko T. Enikov, University of Arizona, USA.

Inhaltsangabe

to Micro-Systems and to the Techniques for Their Fabrication.- Microstructures Under Electrostatic Loads: Discrete System Modelling.- Dynamics of Mechatronic Systems at Microscale.- Continuum Microstructures Loaded Electrostatically.- Design of Electro-Thermal Micro-Actuators: Mechanics and Electronic Position Detection.- Design of Compliant Micromechanisms.- Micro- and Nano-assembly and Manipulation Techniques for MEMS.- Microfluidics: Device Science and Technology.