Microwave Discharges (eBook, PDF)

Fundamentals and Applications
Redaktion: Ferreira, Carlos M.; Moisan, Michel

• Format: PDF

Produktbeschreibung

Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992

---

Dieser Download kann aus rechtlichen Gründen nur mit Rechnungsadresse in A, B, BG, CY, CZ, D, DK, EW, E, FIN, F, GR, HR, H, IRL, I, LT, L, LR, M, NL, PL, P, R, S, SLO, SK ausgeliefert werden.

Produktdetails

• Verlag: Springer New York
• Seitenzahl: 564
• Erscheinungstermin: 21. November 2013
• Englisch
• ISBN-13: 9781489911308
• Artikelnr.: 44053712

Inhaltsangabe

Surface Wave Discharges.- The Contribution of Surface-Wave-Sustained Plasmas to HF Plasma Generation, Modeling and Applications: Status and Perspectives.- Wave Propagation in Bounded Plasmas.- Microwave Discharges: Structures and Stability.- Non-Linear Behaviour of Surface Wave Propagation in Plasma-Waveguides.- Modeling of Surface Wave Produced Discharges in Argon at Low to Intermediate Pressure.- Strongly Damped Surface Waves in Plasmas.- Theory of Low-Pressure Plasma Columns Produced by Electromagnetic Waves in the Presence of a Constant Axial Magnetic Field.- Some Aspects of Nonlinear Theory of Ionizing Surface Plasma Waves.- Microwave Plasma Sources.- Surface-Wave Plasma Sources.- Modeling of Surface-Wave-Sustained Plasmas in Static Magnetic Fields: A Tool for the Study of Magnetically Assisted HF Plasmas.- ECR Plasma Sources.- Distributed ECR: Concept, Performances and Perspectives.- Large Area Planar Microwave Plasmas.- Fabry-Perot-Type-Microwave Resonator.- Diagnostics.- Diagnostics of Microwave Discharges.- Thermal Discharges: Experiments and Diagnostics.- Optical Diagnostics in Radiofrequency Glow and Afterglow.- Optical Diagnostics for High Electron Density Plasmas.- Use of Emissive Probes in HF Plasmas.- Experimental and Theoretical Determination of Electron Energy Distribution Functions in Surface Wave Plasmas.- Modeling.- Kinetic Modeling of Microwave Discharges.- Collision Dominated Electron Kinetics in Low and High Frequency Fields.- Power Deposition in Low Pressure Capacitively Coupled RF Discharges.- Time Dependent Electron Energy Distribution Functions in Molecular Gases.- Excitation Equilibria in Plasmas; A Classification.- Nonequilibrium Motion of Electrons and Ions Near Absorbing Boundaries.- Light Sources.- Applications of Microwave Discharges toHigh-Power Light Sources.- Applications.- Semiconductor Processing Applications of Microwave Plasmas.- Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas.- Production of Active Species in Flowing Microwave Discharges for Iron Surface Treatment and Diamond Film Deposition.- Surface Wave Plasmas in O2-N2 Mixtures as Active Species Sources for Surface Treatments.- Applications of Distributed Electron Cyclotron Resonance (DECR) to Plasma-Surface Interaction.- Applications of Microwave Discharges to Elemental Analysis.- Microwave Methods for the Fabrication of Optical Fibers.- Diamond Films: Procedures and Parameters.- Participants.