Jörg Florian Friedrich, Jürgen Meichsner

Nonthermal Plasmas for Materials Processing (eBook, PDF)

• Format: PDF

Produktbeschreibung

NONTHERMAL PLASMAS FOR MATERIALS PROCESSING This unique book covers the physical and chemical aspects of plasma chemistry with polymers and gives new insights into the interaction of physics and chemistry of nonthermal plasmas and their applications in materials science for physicists and chemists. The properties and characteristics of plasmas, elementary (collision) processes in the gas phase, plasma surface interactions, gas discharge plasmas and technical plasma sources, atmospheric plasmas, plasma diagnostics, polymers and plasmas, plasma polymerization, post-plasma processes, plasma, and wet-chemical processing, plasma-induced generation of functional groups, and the chemical reactions on these groups along with a few exemplary applications are discussed in this comprehensive but condensed state-of-the-art book on plasma chemistry and its dependence on plasma physics. While plasma physics, plasma chemistry, and polymer science are often handled separately, the aim of the authors is to harmoniously join the physics and chemistry of low-pressure and atmospheric-pressure plasmas with polymer surface chemistry and polymerization and to compare such chemistry with classic chemistry. Readers will find in these chapters * Interaction of plasma physics and chemistry in plasmas and at the surface of polymers; * Explanation and interpretation of physical and chemical mechanisms on plasma polymerization and polymer surface modification; * Introduction of modern techniques in plasma diagnostics, surface analysis of solids, and special behavior of polymers on exposure to plasmas; * Discussion of the conflict of energy-rich plasma species with permanent energy supply and the much lower binding energies in polymers and alternatives to avoid random polymer decomposition * Technical applications such as adhesion, cleaning, wettability, textile modification, coatings, films, etc. New perspectives are explained about how to use selective and mild processes to allow post-plasma chemistry on non-degraded polymer surfaces. Audience Physicists, polymer chemists, materials scientists, industrial engineers in biomedicine, coatings, printing, etc.

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Produktdetails

• Verlag: Jossey-Bass
• Seitenzahl: 704
• Erscheinungstermin: 30. Juni 2022
• Englisch
• ISBN-13: 9781119364771
• Artikelnr.: 64293088

Autorenporträt

Jörg Florian Friedrich is a chemist at the Technical University of Berlin. He has worked in the fields of plasma chemistry, polymer chemistry, and polymer and surface analytics since 1972 and has published several books on these topics. His special interest is the clarification and explanation of chemistry in plasma and at the surface of polymers. Jürgen Meichsner is a physicist at the University of Greifswald. He has worked in the field of low-temperature plasma physics and plasma surface interaction, e.g., plasma polymerization and polymer surface modification/functionalization since 1977. He has published numerous articles in peer-reviewed journals and a few book contributions. His special interest is the diagnostics of molecular low-temperature plasmas and the analysis of thin organic films and surfaces.

Inhaltsangabe

Preface xiii

1 Introduction 1

References 15

2 Basic Principles of the Plasma State of Matter 17

2.1 Characteristics and Physical Properties of Plasmas 17

2.1.1 Ionization Degree, Energy Content and Classification 17

2.1.2 Quasi-Neutrality, Debye Shielding Length, Plasma Frequency 19

2.1.3 Ambipolar Diffusion 24

2.1.4 High-Frequency Conductivity and Permittivity of Non-Thermal Plasmas 26

2.1.5 Charged Particles in External Magnetic Field 30

2.1.6 Thermal and Non-Thermal Plasmas 34

2.1.7 Plasma Kinetics and Transport Equations 40

References 56

2.2 Elementary Processes and Collision Cross Section 57

2.2.1 Classification of Collision Processes in Non-Thermal Plasmas 57

2.2.2 The Collision Cross Section 64

References 77

2.3 Interaction of Non-Thermal Plasmas with Condensed Matter 79

2.3.1 Stationary Plasma Boundary Sheath and Bohm Criterion 80

2.3.2 Plasma Boundary Sheath in Front of the Floating Surface 83

2.3.3 Generalized Bohm Sheath Criterion 84

2.3.4 High-Voltage Plasma Sheath 84

2.3.5 Non-Stationary Plasma Sheaths 88

References 93

2.4 Non-Thermal Plasmas of Electric Gas Discharges 94

2.4.1 Overview 94

2.4.2 The Electric Breakdown in Gases 95

2.4.3 The Glow Discharge 101

2.4.4 Glow Discharges at Harmonic Electric Fields, RF and MW Plasmas 109

2.4.5 High-Voltage Breakdown at Atmospheric Pressure, Corona and Barrier Discharge 115

References 118

3 Plasma Diagnostics 119

3.1 Introduction 119

3.2 Overview of Diagnostic Methods Used for the Characterization of Non-Thermal Plasmas 119

3.3 Analysis of Charged and Neutral Plasma Particles in Non-Thermal Plasmas 119

3.3.1 Electric Probe Measurements 119

3.3.2 Special Case for Single Electric Probe Measurements in Radio-Frequency (RF) Plasmas 133

3.4 Microwave Interferometry 136

3.4.1 Microwave Propagation in Non-Magnetic Plasmas 136

3.4.2 Heterodyne Microwave Interferometry at 160 GHz 138

3.4.3 Electron Density Analysis in CCP and ICP with Argon and Oxygen as Processing Gas 140

3.5 Mass Spectrometry 143

3.5.1 Principle of Mass Spectrometry 143

3.5.2 Quadrupole Mass Spectrometry 143

3.5.3 Analysis of Low-Pressure Plasmas by Quadrupole Mass Spectrometry 145

References 155

3.6 Plasma and Laser-Induced Optical Emission Spectroscopy 157

3.6.1 Spectral Analysis of Plasma Emission (VUV, UV-vis-NIR) 157

3.6.1.1 Optical Emission Spectroscopy (OES) of Low-Pressure Plasmas - Examples 159

3.6.1.2 Determination of the Rotation Temperature from Atmospheric O2 A Band, PP and PQ Branch 161

3.6.1.3 Determination of Ground State Particle Density from Plasma Emission Spectrum 164

3.6.1.4 Abel Inversion 165

3.6.1.5 Phase Resolved Optical Emission Spectroscopy (PROES) of RF Plasmas 166

3.6.2 Laser-Induced Fluorescence (LIF) Spectroscopy 169

3.7 IR Broadband and IR Laser Absorption Spectroscopy 172

3.7.1 Fourier Transform Infrared (FTIR) Spectroscopy for Gas Phase Analysis 172

3.7.1.1 Principle of FTIR Spectroscopy 172

3.7.1.2 FTIR Gas Phase Spectroscopy of RF Plasma with Precursor Ethylenediamine and Argon 178

3.7.2 Infrared Tunable Diode Laser Absorption Spectroscopy (IR-TDLAS) 180

3.7.2.1 Configuration of the IR-TDLAS Experiment 180

3.7.2.2 Principle Procedure for Measuring Single Absorption Lines 181

3.7.2.3 IR-TDLAS of Fluoro