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Written by well-known specialists in the field, Radio-Frequency Capacitive Discharges systematically describes radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. It provides a comprehensive treatment of the physics underlying rf discharges, techniques for generating such discharges, experimental methods and measurement techniques, and numerous recent research results. The authors furnish clear simple discussions that lend great insight into complicated physical phenomena.
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