Jie Cheng

Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect (eBook, PDF)

• Format: PDF

Produktbeschreibung

This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material. Pursuing a systematic approach to resolve the remaining critical issues in the CMP, it first investigates the tribocorrosion properties and the material removal mechanisms of copper (Cu) and Ru in KIO₄-based slurry. The thesis subsequently studies Cu/Ru galvanic corrosion from a new micro and in-situ perspective, and on this basis, seeks ways to mitigate corrosion using different slurry additives. The findings presented here constitute a significant advance in fundamental and technical investigations into the CMP, while also laying the groundwork for future research.

Produktdetails

• Verlag: Springer Singapore
• Erscheinungstermin: 6. September 2017
• Englisch
• ISBN-13: 9789811061653
• Artikelnr.: 52940188

Inhaltsangabe

Introduction.- Material Removal Mechanism of Cu in KIO ₄-based Slurry.- Material Removal Mechanism of Ru in KIO ₄-based Slurry.- Tribocorrosion Investigations of Cu/Ru Interconnect Structure during CMP.- Micro-galvanic Corrosion of Cu/Ru Couple in KIO ₄ Solution.- Galvanic Corrosion Inhibitors for Cu/Ru Couple During Chemical Mechanical Polishing of Ru.- Synergetic Effect of Potassium Molybdate and Benzotriazole on the CMP of Ru and Cu in KIO ₄-based Slurry.- Conclusions and Recommendations.

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Introduction.- Material Removal Mechanism of Cu in KIO 4 -based Slurry.- Material Removal Mechanism of Ru in KIO 4 -based Slurry.- Tribocorrosion Investigations of Cu/Ru Interconnect Structure during CMP.- Micro-galvanic Corrosion of Cu/Ru Couple in KIO 4 Solution.- Galvanic Corrosion Inhibitors for Cu/Ru Couple During Chemical Mechanical Polishing of Ru.- Synergetic Effect of Potassium Molybdate and Benzotriazole on the CMP of Ru and Cu in KIO 4 -based Slurry.- Conclusions and Recommendations.