Resonant Network Antennas for Radio-Frequency Plasma Sources (eBook, ePUB)
Theory, technology and applications
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RF resonant network antennas are versatile, spatially-distributed plasma sources that offer an alternative to conventional capacitively- and inductively-coupled monolithic plasma reactors. Their resonant nature means that they overcome the usual limitations of plasma sources, notably in terms of size and input impedance. Whether planar or cylindrical, resonant network antennas have numerous potential applications for plasma processing, helicon sources, plasma thrusters, etc. They are increasingly employed by the plasma industry, and the theory has now developed alongside the technological appl...
RF resonant network antennas are versatile, spatially-distributed plasma sources that offer an alternative to conventional capacitively- and inductively-coupled monolithic plasma reactors. Their resonant nature means that they overcome the usual limitations of plasma sources, notably in terms of size and input impedance. Whether planar or cylindrical, resonant network antennas have numerous potential applications for plasma processing, helicon sources, plasma thrusters, etc. They are increasingly employed by the plasma industry, and the theory has now developed alongside the technological applications to the extent that it is timely to document the progress in this field to aid antenna design for future novel RF plasma sources.
This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma. It describes industrial applications, and covers state-of-the-art research in helicon wave physics and sources with plasma diagnostics. The book is divided into four parts, covering resonant network antennas without plasma, antennas in magnetized and non-magnetized plasma, and finally, technology and future developments of resonant network antennas. This book would appeal to plasma physicist professionals and students, industrial R&D, the semiconductor industry, fusion research, and research scientists in general.
This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma. It describes industrial applications, and covers state-of-the-art research in helicon wave physics and sources with plasma diagnostics. The book is divided into four parts, covering resonant network antennas without plasma, antennas in magnetized and non-magnetized plasma, and finally, technology and future developments of resonant network antennas. This book would appeal to plasma physicist professionals and students, industrial R&D, the semiconductor industry, fusion research, and research scientists in general.
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