Run-to-Run Control in Semiconductor Manufacturing (eBook, PDF)

Redaktion: Moyne, James; Hurwitz, Arnon M.; Del Castillo, Enrique

• Format: PDF

Produktbeschreibung

The fruit of nearly ten years of active work and collaboration in both the academic and industrial settings, this book offers in-depth analyses of run-to-run (R2R) control. The authors develop methods with a totally new, commercially proven approach that provides a path to the robust, effective R2R control destined to replace the ad hoc, piecemeal, error-prone, or, in most cases, nonexistent sequential control methods of the past. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.

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Produktdetails

• Verlag: Taylor & Francis
• Seitenzahl: 368
• Erscheinungstermin: 8. Oktober 2018
• Englisch
• ISBN-13: 9781420040661
• Artikelnr.: 52994370