- Explains issues that make signal measurement and estimation techniques difficult at the micro-nano-scale and offers solutions
- Discusses automated micro-assembly, and control of micro-nano robotic devices
- Presents and links signal measurement and estimation techniques for micro-nano scale systems with microfabrication methods, sensors integration and control schemes
Signal Measurement and Estimation Techniques for Micro and Nanotechnology is a must-read for researchers and engineers working in MEMS and control systems.
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