J. Mazumder, Aravinda Kar

Theory and Application of Laser Chemical Vapor Deposition (eBook, PDF)

• Format: PDF

Produktbeschreibung

In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.

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Produktdetails

• Verlag: Springer New York
• Seitenzahl: 396
• Erscheinungstermin: 29. Juni 2013
• Englisch
• ISBN-13: 9781489914309
• Artikelnr.: 44173588

Inhaltsangabe

1. Introduction.- 2. Pyrolytic LCVD.- 3. Photolytic LCVD.- 4. Pyrolytic LCVD Modeling.- 5. Photolytic LCVD Modeling.- A.1. Definitions of Energy Density, Irradiance, and Intensity.- A.2. Thermal Stress Analysis.- A.3. Volumetric Absorption Rate.- Nomenclature.- References.