Wafer Level 3-D ICs Process Technology (eBook, PDF)

Redaktion: Tan, Chuan Seng; Reif, L. Rafael; Gutmann, Ronald J.

• Format: PDF

Produktbeschreibung

Wafer Level 3-D ICs Process Technology focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses alternative technology platforms for pre-packaging wafer level 3-D ICs, with an emphasis on wafer-to-wafer stacking. Driven by the need for improved performance, a number of companies, consortia and universities are researching methods to use short, monolithically-fabricated, vertical interconnections to replace the long interconnects found in 2-D ICs. Stacking disparate technologies to provide various combinations of densely-packed functions, such as logic, memory, MEMS, displays, RF, mixed-signal, sensors, and power delivery is potentially possible with 3-D heterogeneous integration, making this technology the "Holy Grail" of system integration.

Wafer Level 3-D ICs Process Technology is an edited book based on chapters contributed by various experts in the fields of wafer-level 3-D ICs process technology and applications enabled by 3-D integration.

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Produktdetails

• Verlag: Springer New York
• Seitenzahl: 410
• Erscheinungstermin: 29. Juni 2009
• Englisch
• ISBN-13: 9780387765341
• Artikelnr.: 37288549

Inhaltsangabe

Overview of Wafer Level 3-D ICs.- Monolithic 3-D Integrated Circuits.- Stacked CMOS Technologies.- Wafer Bonding Technologies and Strategies for 3-D ICs.- Through Silicon Via Fabrication, Backgrind, and Handle Wafer Technologies.- Cu Wafer Bonding for 3-D ICs Applications.- Cu/Sn Solid-Liquid Interdiffusion Bonding.- An SOI-Based 3-D Circuit Integration Technology.- 3-D Fabrication Options for High Performance CMOS Technology.- 3-D Integration Based upon Dielectric Adhesive Bonding.- Direct Hybrid Bonding.- 3-D Memory.- Circuit Architectures for 3-D Integration.- Thermal Challenges of 3-D ICs.- Status and Outlook.