Imin Kao, Chunhui Chung

Wafer Manufacturing (eBook, ePUB)

Shaping of Single Crystal Silicon Wafers

• Format: ePub

Produktbeschreibung

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.

This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.

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Produktdetails

• Verlag: John Wiley & Sons
• Erscheinungstermin: 5. Januar 2021
• Englisch
• ISBN-13: 9781118696231
• Artikelnr.: 62249979

Autorenporträt

Imin Kao, is Professor in the Department of Mechanical Engineering at the State University of New York in Stony Brook, USA. He is Faculty Director of the Undergraduate College in Information and Technology Studies. He holds three patents, and his research foci include robotic manipulation with soft contacts and smart contact surface technology using MEMS.

Chunhui Chung, is Associate Professor in the Department of Mechanical Engineering at the National Cheng Kung University in Taiwan.