This book content Design, construction and establishing, operating and modifying a sputter system to incorporate D.C. sputtering capabilities and magnetron D.C. sputtering. Focus also on preparation bulk thermoelectric material as sputtering targets by solid solution process and studies its structure, electrical properties and thermoelectric properties to dedicate enhancement in efficiency after adding element. It also content preparation procedure of thin films by both sputtering deposition techniques and study the structure properties and their thermoelectric properties to dedicate enhance in efficiency by introducing nanostructures. This book gains a prize as the best Ph.D. Dissertation in Science at Al-Nahrain University in 2015.