D. Lange, O. Brand, H. Baltes

CMOS Cantilever Sensor Systems (eBook, PDF)

Atomic Force Microscopy and Gas Sensing Applications

• Format: PDF

Produktbeschreibung

This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.

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Produktdetails

• Verlag: Springer Berlin Heidelberg
• Seitenzahl: 142
• Erscheinungstermin: 17. April 2013
• Englisch
• ISBN-13: 9783662050606
• Artikelnr.: 53317373

Autorenporträt

Henry Baltes is Professor Emeritus of ETH Zurich affiliated with Micro and Nanosystems at the Department of Mechanical and Process Engineering. He was Professor of Physical Electronics at ETH Zurich and Director of the Physical Electronics Laboratory (PEL) from 1988 to 2006. In 2004 and 2005 he acted as start-up Chair of the future Department of Biosystems Science and Engineering (D-BSSE) of ETH Zurich located at Basel. Henry Baltes is a Fellow of the IEEE and a Member of the Swiss Academy of Technical Sciences. He served on the Editorial Board of the Proceedings of the IEEE, the Search Committee of the Koerber Foundation, and the Advisory Committee of the Freiburg Institute of Advanced Sudies. He is a co-founder of the spin-off company SENSIRION.

Inhaltsangabe

1. Introduction.- 2. Design Considerations.- 3. Cantilever Beam Resonators.- 4. Resonant Gas Sensor.- 5. Force Sensors for Parallel Scanning Atomic Force Microscopy.- 6. Conclusions and Outlook.- Appendices.- A.1 Process Sequence Resonant Gas Sensor.- A.2 Process Sequence Resonant Gas Sensor (Maskless).- A.3 Process Sequence AFM Sensor Arrays.- A.4 Material Properties of Thin Film Materials.- References.