Harland G Tompkins

A User's Guide to Ellipsometry

• Broschiertes Buch

Produktbeschreibung

Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition.

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Produktdetails

• Verlag: Dover Publications
• Seitenzahl: 288
• Erscheinungstermin: 7. Juli 2006
• Englisch
• Abmessung: 216mm x 143mm x 14mm
• Gewicht: 299g
• ISBN-13: 9780486450285
• ISBN-10: 0486450287
• Artikelnr.: 21489011

Autorenporträt

Author Harland G. Tompkins is a Mesa, Arizona-based scientist associated with Motorola, Inc.

Inhaltsangabe

1. Theoretical Aspects 2. Instrumentation 3. Using Optical Parameters to
Determine Material Properties 4. Determining Optical Parameters for
Inaccessible Substrates and Unknown Films 5. Extremely Thin Films 6. The
Special Case of Polysilicon 7. The Effect of Roughness Case Studies Case 1.
Dissolution and Swelling of Thin Polymer Films Case 2. Ion Beam Interaction
with Silicon Case 3. Dry Oxidation of Metals Case 4. Optical Properties of
Sputtered Chromium Suboxide Thin Films Case 5. Ion-assisted Film Growth of
Zirconium Dioxide Case 6. Electrochemical/Ellipsometric Studies of Oxides
on Metals Case 7. Amorphous Hydrogenated Carbon Films Case 8. Fluoropolymer
Films on Silicon from Reactive Ion Etching Case 9. Various Films on InP
Case 10. Benzotriazole and Benzimidazole on Copper Case 11. Gas Adsorption
on Metal Surfaces Case 12. Silicon-Germanium Thin Films Case 13. Profiling
of HgCdTe Case 14. Oxides and Nitrides of Silicon Appendices