Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition.
Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition.Hinweis: Dieser Artikel kann nur an eine deutsche Lieferadresse ausgeliefert werden.
Author Harland G. Tompkins is a Mesa, Arizona-based scientist associated with Motorola, Inc.
Inhaltsangabe
1. Theoretical Aspects 2. Instrumentation 3. Using Optical Parameters to Determine Material Properties 4. Determining Optical Parameters for Inaccessible Substrates and Unknown Films 5. Extremely Thin Films 6. The Special Case of Polysilicon 7. The Effect of Roughness Case Studies Case 1. Dissolution and Swelling of Thin Polymer Films Case 2. Ion Beam Interaction with Silicon Case 3. Dry Oxidation of Metals Case 4. Optical Properties of Sputtered Chromium Suboxide Thin Films Case 5. Ion-assisted Film Growth of Zirconium Dioxide Case 6. Electrochemical/Ellipsometric Studies of Oxides on Metals Case 7. Amorphous Hydrogenated Carbon Films Case 8. Fluoropolymer Films on Silicon from Reactive Ion Etching Case 9. Various Films on InP Case 10. Benzotriazole and Benzimidazole on Copper Case 11. Gas Adsorption on Metal Surfaces Case 12. Silicon-Germanium Thin Films Case 13. Profiling of HgCdTe Case 14. Oxides and Nitrides of Silicon Appendices
1. Theoretical Aspects 2. Instrumentation 3. Using Optical Parameters to Determine Material Properties 4. Determining Optical Parameters for Inaccessible Substrates and Unknown Films 5. Extremely Thin Films 6. The Special Case of Polysilicon 7. The Effect of Roughness Case Studies Case 1. Dissolution and Swelling of Thin Polymer Films Case 2. Ion Beam Interaction with Silicon Case 3. Dry Oxidation of Metals Case 4. Optical Properties of Sputtered Chromium Suboxide Thin Films Case 5. Ion-assisted Film Growth of Zirconium Dioxide Case 6. Electrochemical/Ellipsometric Studies of Oxides on Metals Case 7. Amorphous Hydrogenated Carbon Films Case 8. Fluoropolymer Films on Silicon from Reactive Ion Etching Case 9. Various Films on InP Case 10. Benzotriazole and Benzimidazole on Copper Case 11. Gas Adsorption on Metal Surfaces Case 12. Silicon-Germanium Thin Films Case 13. Profiling of HgCdTe Case 14. Oxides and Nitrides of Silicon Appendices
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