Ambarish Paul, Mitradip Bhattacharjee, Ravinder Dahiya

Solid-State Sensors

• Gebundenes Buch

Produktbeschreibung

Solid-State Sensors

A thorough and up-to-date introduction to solid-state sensors, materials, fabrication processes, and applications

Solid-State Sensors provides a comprehensive introduction to the field, covering fundamental principles, underlying theories, sensor materials, fabrication technologies, current and possible future applications, and more. Presented in a clear and accessible format, this reader-friendly textbook describes the fundamentals and classification of all major types of solid-state sensors, including piezoresistive, capacitive, thermometric, optical bio-chemical, magnetic, and acoustic-based sensors.

Throughout the text, the authors offer insight into how different solid-state methods complement each other as well as their respective advantages and disadvantages in relation to specific devices and a variety of state-of-the-art applications. Detailed yet concise chapters include numerous visual illustrations and comparative tables of different subtypes of sensors for a given application.

With in-depth discussion of recent developments, current research, and key challenges in the field of solid-state sensors, this volume:
_ Describes solid-state sensing parameters and their importance in sensor characterization
_ Explores possible future applications and breakthroughs in associated fields of research
_ Covers the fundamental principles and relevant equations of sensing phenomena
_ Discusses promising smart materials that have the potential for sensing applications
_ Includes an overview of the history, classification, and terminology of sensors

With well-balanced coverage of the fundamentals of sensor design, current and emerging applications, and the most recent research developments in the field, Solid-State Sensors is an excellent textbook for advanced students and professionals in disciplines such as Electrical and Electronics Engineering, Physics, Chemistry, and Biomedical Engineering.

---

Hinweis: Dieser Artikel kann nur an eine deutsche Lieferadresse ausgeliefert werden.

Produktdetails

• IEEE Press Series on Sensors
• Verlag: Wiley & Sons / Wiley-IEEE Press
• Artikelnr. des Verlages: 1W119473040
• 1. Auflage
• Seitenzahl: 448
• Erscheinungstermin: 24. Oktober 2023
• Englisch
• Abmessung: 235mm x 157mm x 29mm
• Gewicht: 699g
• ISBN-13: 9781119473046
• ISBN-10: 1119473047
• Artikelnr.: 63085263

Autorenporträt

AMBARISH PAUL, PhD, is currently working on bendable sensors for healthcare management at the University of Glasgow, UK. He has authored research articles in reputed IEEE journals in the fields of microfabrication and chemical-based pressure sensors. MITRADIP BHATTACHARJEE, PhD, is an Assistant Professor with the Department of Electrical Engineering and Computer Science at the Indian Institute of Science Education and Research (IISER) Bhopal, India. RAVINDER DAHIYA, PhD, is a Professor in the Department of Electrical and Computer Engineering at Northeastern University, Boston, USA. His group (Bendable Electronics and Sustainable Technologies) conducts research in flexible printed electronics, electronic skin, and their applications in robotics, wearables, and interactive systems.

Inhaltsangabe

About the Authors xv

Preface xvii

1 Introduction 1

1.1 Overview 1

1.1.1 Growth in Solid-State Sensor Market 2

1.1.2 Solid-State Sensors: A Recipe for Smart Sensing Systems 5

1.2 Evolution of Solid-State Sensors 6

1.2.1 Origin and Early Developments in Detection Devices 6

1.2.2 Solid-State Electronics: Post Transistor Era 9

1.2.3 Emergence of New Technologies 12

1.2.3.1 Thin-Film Technology 14

1.2.3.2 Advancements in Micro- and Nanofabrication 14

1.2.3.3 Emergence of Nanotechnology 16

1.2.3.4 Printed Electronics on Flexible Substrates 17

1.2.3.5 Smart Devices with Artificial Intelligence 20

1.2.3.6 IoT-Enabled Sensors 21

1.2.4 Paradigm Shift in Solid-State Sensor Research 22

1.2.4.1 Organic Devices 23

1.2.4.2 Wearable Devices 24

1.2.4.3 Implantable Sensors 25

1.3 Outline 27

References 28

2 Classification and Terminology 35

2.1 Sensor Components 35

2.2 Classification of Solid-State Sensors 36

2.3 Sensor Terminology 40

2.3.1 Accuracy 40

2.3.2 Precision 41

2.3.3 Calibration Curve 41

2.3.4 Sensitivity 41

2.3.5 Threshold/Minimum Detectable Limit 42

2.3.6 Null Offset 42

2.3.7 Dynamic Range 42

2.3.8 Nonlinearity 42

2.3.9 Hysteresis 43

2.3.10 Selectivity 43

2.3.11 Repeatability 43

2.3.12 Reproducibility 43

2.3.13 Resolution 43

2.3.14 Stability 43

2.3.15 Noise 44

2.3.16 Response and Recovery Time 44

2.3.17 Drift 45

2.4 Conclusion 45

References 45

3 Fabrication Technologies 47

3.1 Introduction 47

3.2 Deposition 48

3.2.1 Physical Vapor Deposition 49

3.2.1.1 Thermal Evaporation 50

3.2.1.2 Sputter Deposition 52

3.2.1.3 Electron-Beam PVD 55

3.2.1.4 Laser Ablation 58

3.2.2 Electroplating 59

3.2.3 Thermal Oxidation 61

3.2.4 Chemical Vapor Deposition 62

3.2.4.1 Atmospheric Pressure Chemical Vapor Deposition 62

3.2.4.2 Low-Pressure Chemical Vapor Deposition 63

3.2.4.3 Plasma-Enhanced Chemical Vapor Deposition 63

3.3 Exposure-Based Lithography Techniques 64

3.3.1 UV Lithography 65

3.3.1.1 Exposure Tool 65

3.3.1.2 Mask 66

3.3.1.3 Photoresist 67

3.3.2 Electron-Beam Lithography 68

3.3.3 X-Ray Lithography 71

3.3.4 Ion-Beam Lithography 71

3.4 Soft Lithography Techniques 72

3.4.1 Particle Replication in Nonwetting Templates 74

3.4.2 Microcontact Printing 75

3.4.3 Microfluidic Patterning 77

3.4.4 Laminar Flow Patterning 79

3.4.5 Step and Flash Imprint Lithography 80

3.4.6 Hydrogel Template 82

3.5 Etching 83

3.5.1 Wet Etching 85

3.5.2 Dry Etching 89

3.6 Doping 90

3.6.1 Diffusion 92

3.6.2 Ion Implantation 94

3.7 Solution Processed Methods 95

3.7.1 Inkjet Printing 95

3.7.2 Drop Dispensing 98

3.7.3 Spray Deposition 100

3.7.4 Screen Printing 101

3.7.5 Tape Casting 103

3.8 Conclusions 105

References 106

4 Piezoelectric Sensors 113

4.1 Overview 113

4.2 Theory of Piezoelectricity 115

4.2.1 Direct Piezoelectric Effect 115

4.2.2 Poling 116

4.2.3 Static Piezoelectricity 118
&