Glancing Angle Deposition of Thin Films

Engineering the Nanoscale

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This book provides a highlypractical treatment of Glancing Angle Deposition (GLAD), a thinfilm fabrication technology optimized to produce precisenanostructures from a wide range of materials. GLAD providesan elegant method for fabricating arrays of nanoscale helices,chevrons, columns, and other porous thin film architectures usingphysical vapour deposition processes such as sputtering orevaporation. The book gathers existing procedures,methodologies, and experimental designs into a single, cohesivevolume which will be useful both as a ready reference for those inthe field and as a definitive ...