Thomas B. Jones is Professor of Electrical Engineering at the University of Rochester. An experienced educator involved in teaching for over 40 years, his research has focused on electric field-mediated manipulation and transport of particles and liquids. He holds a PhD from the Massachusetts Institute of Technology, is the author of Electromechanics of Particles (Cambridge University Press, 1995) and is a Fellow of the IEEE.
1. Introduction
2. Circuit-based modeling
3. Capacitive lumped parameter electromechanics
4. Small-signal capacitive electromechanical systems
5. Capacitive sensing and resonant drive circuits
6. Distributed 1-D and 2-D electromechanical structures
7. Practical MEMS devices
8. Electromechanics of piezoelectric elements
9. Electromechanics of magnetic MEMS devices
A. Review of quasistatic electromagnetics
B. Review of mechanical resonators
C. Micromachining
D. A brief review of solid mechanics.