Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

Fabrication of Silicon Microprobes for Optical Near-Field Applications (eBook, PDF)

• Format: PDF

Produktbeschreibung

Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical performance characteristics and show how silicon probes overcome the limitations of the optical fiber probes in terms of production throughput, optical throughput, reproducibility, simplicity of instrumentation, and mechanical performance.

---

Dieser Download kann aus rechtlichen Gründen nur mit Rechnungsadresse in A, B, BG, CY, CZ, D, DK, EW, E, FIN, F, GR, HR, H, IRL, I, LT, L, LR, M, NL, PL, P, R, S, SLO, SK ausgeliefert werden.

Produktdetails

• Verlag: Taylor & Francis
• Seitenzahl: 192
• Erscheinungstermin: 8. Oktober 2018
• Englisch
• ISBN-13: 9781420040708
• Artikelnr.: 52925587

Autorenporträt

Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi