This Book presents a work on improving the performance of micro thermoelectric generator (µTEG) for solar energy conversion applications and also developing a highly reliable bridge type design. The performance is improved by optimizing the material parameters for the operating temperature and also by optimizing the design of the µTEG. Optimization of material is done based on the figure of merit of the material. Also the suitability of the material for MEMS fabrication and user friendliness of the material are considered for the selection of material. Perovskite type CaMn0.98 Nb0.02 O3 is considered as the optimum material for the solar energy conversion. The operating temperature of Perovskite Type CaMn0.98Nb0.02O3 varies from 300K to 800K. Thermoelectric properties of Perovskite Type CaMn0.98Nb0.02O3 at 600K (Seebeck coefficient is 210 µV/K, thermal conductivity is 1.85 W/(m-K) and electrical conductivity is 4081.6327 S/m) are obtained. One of the main requirement in the design of thermoelectric module is to determine the optimum geometry in order to obtain high performance and to reduce the cost of µTEG.