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At 20mA injection current, compared with the flat ITO LEDs, the improvements of the convex micro- textured ITO ones in lumen, mcd and light output power (mW) are 9.8%, 13.8% and 16.3%, respectively. By controlling the wet etching time of two different ITO patterns carefully, so we could not degrade the forward voltage (VF) of micro-textured ITO LEDs. At 350mA injection current, compared with the flat surface LEDs, the improvement of the convex micro- textured ITO and n-GaN roughening ones in mcd, lm and mW are 22.5%, 36.5% and 50% respectively, because of the higher light extraction efficiency.